Homework 2:
| Assigned: | Feb 03, 2003 |
| Due: | Feb 10, 2003 |
Material Properties Scavenger Hunt (individual assignment)
Each person needs to find the following information from books, journals, the internet (with proper credit)
 | Mass density |
| Young’s modulus and Poisson ratio |
| Tensile strength, fracture strength, or other fracture-related quantity |
| The residual stress if deposited on a silicon wafer |
| Specific heat |
| Thermal conductivity |
| Dielectric constant or Electrical conductivity (or a range of conductivities) |
| Index of refraction (at some wavelength in the visible) |
You need only find a representative value, not necessarily the best value, but if you can provide some perspective on the "confidence" you have in this data, that would be good.
The data should be compiled, annotated with any additional details (for example, how the data was obtained) and referenced to the source (journal paper, etc).Assignments:
| Thermal (wet) Silicon Dioxide | Kevin Wu, Weifeng Shen | |
| LPCVD Silicon Dioxide | Jacy Bird, Ailey Crow | |
| Stoichiometric Silicon Nitride | Greg Berguig, Keng Guan Lin | |
| Silicon-Rich Silicon Nitride ("low-stress") | MinJun Kim, Pradeep Guduru | |
| PVD Platinum, | Hao Li, Matt Laderer | |
| PVD ALuminum | Kyle Meisterling, Evan Metcalf | |
| LPCVD Polysilicon | GuoChun Wang, Jiangfeng Fei |
(Please excuse spelling mistakes!)