MEMS (Micro Electro Mechanical Systems) are complex multifunctional
machines that use micron-scale fabrication processes. The growth in
technology is explosive and has applications in every area of engineering
including the development of sensors (pressure, acceleration, chemical,
enzymes…), Mechanical machines (micro-robots, micro-engines…),
biological devices (DNA synthesizers, micro-cell analysis systems…),
Micro-spacecraft. The field is
highly interdisciplinary, and used tools from all corners of engineering,
physics and mathematics.
This class is an
introduction to this exciting new field. The syllabus will cover a wide
range of topics including: Techniques for MEMS fabrication (“micromachining”),
bulk and surface micromachining, lithography, “soft-lithography”,
wafer-bonding, etc. Integrated mechanical and electrical design of MEMS,
Material properties of MEMS, Applications of MEMS in micro sensors,
actuators, machines, chemical and bio-engineering systems.
There will be a group design project and group homework
assignments.
The class is
appropriate for upper-level undergraduate and graduate students from
mechanical, electrical chemical, materials and biomedical engineering, and should be an acceptable
advanced elective in these fields (confirm this with your advisor).
Students from other disciplines of science and mathematics are also
welcome. The
prerequisites are the core engineering curriculum, or
permission of the instructor.
